MEMS-based high speed scanning probe microscopy
نویسندگان
چکیده
منابع مشابه
Comment on "MEMS-based high speed scanning probe microscopy" [Rev. Sci. Instrum. 81, 043702 (2010)].
In a recent article, Disseldorp et al. [Rev. Sci. Instrum. 81, 043702 (2010)] present a micromachined z-scanner for scanning probe microscopy (SPM). The scanner comprises a micromachined electrostatically actuated membrane anchored to its substrate with crab-leg flexures. This structure is used as a fast actuator specifically for atomic force microscope and scanning tunneling microscope. The au...
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ژورنال
عنوان ژورنال: Review of Scientific Instruments
سال: 2010
ISSN: 0034-6748,1089-7623
DOI: 10.1063/1.3361215